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Process Gas: SiH4 (Silane). Manufacturer: Celerity. Flow Rate: 1000 SCCM. Condition:New Other. This item was removed from a NEW machine that was never put into service. Solenoid Valve Position: Normally Closed.
When you click on links to various merchants on this site and make a purchase, this can result in this site earning a commission. Affiliate programs and affiliations include, but are not limited to, the eBay Partner Network.