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Process Gas: SiH4 (Silane). Manufacturer: Celerity. Series: 8560 Series. Flow Rate: 1,000 SCCM (1 SLM). This item has not been tested as we do not have the proper resources to do so. Seals: Downmount - C Seal.
When you click on links to various merchants on this site and make a purchase, this can result in this site earning a commission. Affiliate programs and affiliations include, but are not limited to, the eBay Partner Network.