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  • Plasma Processes for Semiconductor Fabrication by W.N.G. Hitchon (English) Hardc

    • Item No : 146619939900
    • Condition : Brand New
    • Brand : No brand Info
    • Seller : the_nile
    • Current Bid : US $152.30
    • * Item Description

    • By W.N.G. Hitchon. Author W.N.G. Hitchon. The author begins with an overview of plasma reactors, and discusses the various models for understanding plasma processes. It contains many exercises and will serve as an ideal introduction to plasma processing and technology for graduate students of electrical engineering and materials science.
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