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MKS Instruments EPCA-24592 Control Module for TEL Tokyo Electron Clean Track Lithius System
Model: EPCA-24592
Serial Number: 001660239
Manufacturer: MKS Instruments Inc.
Condition: Excellent condition, removed from working TEL Tokyo Electron Clean Track Lithius System.
Warranty: 30-day warranty included.
Additional Details: This MKS Instruments EPCA-24592 control module was used in a TEL Tokyo Electron Clean Track Lithius System. The unit features multiple RS485 ports, gauge connections, and valve controls. Made in Japan, this control module ensures reliability and precise operation.