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Process Gas: SiCl4 (Silicon Tetrachloride Gas). Manufacturer: Aera. At zero flow it reads 52sccm.". Flow Rate: 200 SCCM. Series: PI-98 Series. Mounting: Surface Mount (C-Seals). Condition:For Parts or Not Working.
When you click on links to various merchants on this site and make a purchase, this can result in this site earning a commission. Affiliate programs and affiliations include, but are not limited to, the eBay Partner Network.